Recently a mini-SEM from Hirox was installed at B-PHOT's Photonic Innovation Center in Gooik. This new table top Scanning Electron Microscope is the first of its kind in Belgium. The SH-5000M, as the instrument is called, was installed in B-PHOT's cleanroom.
The measurement instrument has two built-in detectors (secondary electron and back scattering electron), can work in low and high vacuum and provides the ideal observation for different types of specimen. Next to the topographic and composition analysis, the integrated Bruker X-ray detector allows for identifying, quantifying and mapping the chemical composition of samples.
The SH-5000M provides high-resolution, high-magnification SEM images with the ease of use. Moreover auto-focus, auto-brightness and auto-contrast produce an excellent image every time, with images up to 5 megapixels. B-PHOT will use the mini-SEM to visualise a large variety of samples such as micro and nano-optical and optofluidic components, micro- and nano- structured fibers, and photonic integrated circuits. The table top SEM is able to observe non-conductive samples without coating.
Some pictures made with the SEM: