A brighter, lighter and healthier world
Home » Publications » Deep Proton Writing for the rapid prototyping of polymer micro-components for optical interconnects and optofluidics

Deep Proton Writing for the rapid prototyping of polymer micro-components for optical interconnects and optofluidics

Publication date 2013
B-Phot Authors Jurgen Van Erps, Michael Vervaeke, Heidi Ottevaere, Alex Hermanne, Hugo Thienpont
DOI 10.1016/j.nimb.2012.10.023
Citation
J. Van Erps, M. Vervaeke, H. Ottevaere, A. Hermanne, and H. Thienpont, “Deep Proton Writing for the rapid prototyping of polymer micro-components for optical interconnects and optofluidics,” Nucl. Instrum. Methods in Phys. Res. B, vol. 307, pp. 243–247, 2013.
Abstract The use of photonics in data communication and numerous other industrial applications brought plenty of prospects for innovation and opened up different unexplored market opportunities. This is a major driving force for the fabrication of micro-optical and micro-mechanical structures and their accurate alignment and integration into opto-mechanical modules and systems. To this end, we present Deep Proton Writing (DPW) as a powerful rapid prototyping technology for such micro-components. The DPW process consists of bombarding polymer samples (PMMA or SU-8) with swift protons, which results after chemical processing steps in high-quality micro-optical components. One of the strengths of the DPW micro-fabrication technology is the ability to fabricate monolithic building blocks that include micro-optical and mechanical functionalities which can be precisely integrated into more complex photonic systems. In this paper we comment on how we shifted from using 8.3 to 16.5 MeV protons for DPW and give some examples of micro-optical and micro-mechanical components recently fabricated through DPW, targeting applications in optical interconnections and in optofluidics.
B-PHOT cooperates with EYESTvzw for STEM-projects in Photonics
STEM

Click here for more information...

Contact

Hugo Thienpont
Prof. Dr. Ir.
Hugo Thienpont
Managing Director
Nadia Cornand

Nadia Cornand
Secretary
ncornand@b-phot.org
+32 2 791 68 52

How to reach B-Phot?

VUB - Campus Etterbeek
Pleinlaan 2
1050 Elsene
Building F - 9th floor

More info