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Home » Publications » Micro-Optics for Photonic Interconnections to Silicon chips

Micro-Optics for Photonic Interconnections to Silicon chips

Publication date 2004
B-Phot Authors Michael Vervaeke, Heidi Ottevaere, Jurgen Van Erps
L. Desmet et al., “Micro-Optics for Photonic Interconnections to Silicon chips,” presented at the International Conference on Optics, 2004, pp. 85–86.
Abstract A multi-channel free-space micro-optical module for dense MCM-level optical interconnections has been designed and fabricated. Extensive modeling proves that the module has the potential to scale well into the multi-Tb/s.cm replication techniques. The micro-optical module is an assembly of refractive lenslet-arrays and a high-quality micro-prism. Both components are prototyped using deep lithography with protons and are monolithically integrated using vacuum casting replication technique. This micro-optical module was used in a feasibility denonstrator to establish intra-chip optical interconnections on a 0.6um CMOS opto-electronic field programmable gate array, resulting in the demonstration of four adjacent intra-chip module interconnections.
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