A brighter, lighter and healthier world
Home » Publications » Deep Lithography with Protons for the fabrication of optical waveguides with integrated out-of-plane coupling structures

Deep Lithography with Protons for the fabrication of optical waveguides with integrated out-of-plane coupling structures

Publication date 2005
B-Phot Authors Jurgen Van Erps, Hugo Thienpont
Citation
J. Van Erps, L. Bogaert, B. Volckaerts, and H. Thienpont, “Deep Lithography with Protons for the fabrication of optical waveguides with integrated out-of-plane coupling structures,” in Proc. 2005 Symposium of the IEEE-LEOS Benelux chapter, 2005, pp. 289–292.
Abstract We present Deep Lithography with Protons (DLP) as a promising, fast prototyping technology to fabricate a waveguide-based micro-optical component with monolithically integrated 45° micro-mirrors acting as out-of-plane couplers, splitting the optical signal in 3 separated paths. For the first time, two different proton beam sizes are used during one irradiation and a 2um collimating aperture is chosen to accurately define the out-of-plane coupling structures. We measured the surface roughness (Rq=27.5nm) and the flatness (Rt==3.17um) of the realized components and experimentally measured the optical transmission efficiency of the micro-optical splitter component. The result are in excellent agreement with non-suquential ray-tracing simulations performed for the design
B-PHOT cooperates with EYESTvzw for STEM-projects in Photonics
STEM

Click here for more information...

Contact

Hugo Thienpont
Prof. Dr. Ir.
Hugo Thienpont
Managing Director
Nadia Cornand

Nadia Cornand
Secretary
ncornand@b-phot.org
+32 2 791 68 52

How to reach B-Phot?

VUB - Campus Etterbeek
Pleinlaan 2
1050 Elsene
Building F - 9th floor

More info