|B-Phot Authors||Jurgen Van Erps, Hugo Thienpont|
J. Van Erps, L. Bogaert, B. Volckaerts, and H. Thienpont, “Deep Lithography with Protons for the fabrication of optical waveguides with integrated out-of-plane coupling structures,” in Proc. 2005 Symposium of the IEEE-LEOS Benelux chapter, 2005, pp. 289–292.
|Abstract||We present Deep Lithography with Protons (DLP) as a promising, fast prototyping technology to fabricate a waveguide-based micro-optical component with monolithically integrated 45° micro-mirrors acting as out-of-plane couplers, splitting the optical signal in 3 separated paths. For the first time, two different proton beam sizes are used during one irradiation and a 2um collimating aperture is chosen to accurately define the out-of-plane coupling structures. We measured the surface roughness (Rq=27.5nm) and the flatness (Rt==3.17um) of the realized components and experimentally measured the optical transmission efficiency of the micro-optical splitter component. The result are in excellent agreement with non-suquential ray-tracing simulations performed for the design|
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