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Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region

Publication date 2010
B-Phot Authors Heidi Ottevaere, Nathalie Vermeulen, Hugo Thienpont
DOI 10.1117/12.854690
Citation
H. Ottevaere, N. Vermeulen, V. Gomez, and H. Thienpont, “Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region,” in Proc. SPIE, 2010, vol. 7718, p. 77180N.
Abstract We present a Mach-Zehnder interferometer to characterize semiconductor microlenses in transmission. We therefore make use of a wavelength of 1550nm with the possibility of expansion towards the IR spectrum. In this paper, the concept of our interferometer as well as the set-up is explained. We demonstrate the working principle and measurements on fused silica and silicon microlenses and benchmark the experimental results with measurement data obtained with well established micro-optics instrumentation tools.
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